CONTROL OF A SELF-ALIGNED W-SILICIDE PROCESS BY ANNEALING AMBIENCE

被引：1
|
作者：
TORRES, J [1 ]
PALLEAU, J [1 ]
BOURHILA, N [1 ]
OBERLIN, JC [1 ]
DENEUVILLE, A [1 ]
BENYAHIA, M [1 ]
机构：
[1] CNRS,F-38042 GRENOBLE,FRANCE
来源：
JOURNAL DE PHYSIQUE | 1988年 / 49卷 / C-4期
关键词：
D O I：
10.1051/jphyscol:1988437
中图分类号：
学科分类号：
摘要：
引用
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页码：183 / 186
页数：4
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