MICROCOMPUTER-MULTICHANNEL ANALYZER DATA SYSTEM FOR FOREGROUND-BACKGROUND DATA-COLLECTION AND ANALYSIS

被引：6

|

作者：

BEARD, BC

DAHLGREN, D

ROSS, PN

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.572925

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：2041 / 2043

页数：3

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