DIRECT HETEROBONDING OF LITHIUM-NIOBATE ONTO LITHIUM TANTALATE

被引:16
|
作者
EDA, K
SUGIMOTO, M
TOMITA, Y
机构
[1] Materials and Devices Laboratory, Matsushita Electric Industrial Co. Ltd.
关键词
D O I
10.1063/1.113435
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new method to bond directly different electro-optic materials (lithium niobate on lithium tantalate) for fabricating an optical waveguide is reported. Its fabrication process, interface microstructure, and usefulness for optical devices are also related.© 1995 American Institute of Physics.
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页码:827 / 829
页数:3
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