NOVEL TECHNIQUE OF DETERMINING ALUMINUM QUALITY FOR SAW DEVICES FABRICATION ON YZ-LINBO3

被引：0
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作者：
SINGH, A
机构：
来源：
MICROELECTRONICS AND RELIABILITY | 1983年 / 23卷 / 06期
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D O I：
10.1016/0026-2714(83)90514-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：1027 / 1028
页数：2
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