THICK-FILM PRESSURE SENSORS USING FREE SUPPORTING STRUCTURES

被引:0
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作者
BERGFRIED, D
KUHNT, W
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TECHNISCHES MESSEN | 1989年 / 56卷 / 06期
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TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:250 / 254
页数:5
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