EFFECTS OF A CESIUM ION-BEAM ON GAAS, INP, AND SI

被引：3
|
作者：
GRIES, WH
MIETHE, K
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574523
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1740 / 1741
页数：2
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