PRECISION IN THE ELLIPSOMETRIC DETERMINATION OF THE OPTICAL-CONSTANTS OF VERY THIN-FILMS

被引：8

|

作者：

VUYE, G

LOPEZRIOS, T

机构：

来源：

APPLIED OPTICS | 1982年 / 21卷 / 16期

关键词：

D O I：

10.1364/AO.21.002968

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

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页码：2968 / 2971

页数：4

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