HIGH-SPEED SELECTIVE JET ELECTRODEPOSITION OF GOLD AND COPPER

被引:0
|
作者
BOCKING, C
机构
来源
GEC JOURNAL OF RESEARCH | 1992年 / 9卷 / 03期
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High Speed Selective Jet Electrodeposition (HSSJE) is a process by which metals may be electrodeposited in a spatially selective manner without the need for masking. This paper discusses the principles that underlie HSSJE and the factors that influence the rates of deposition, selectivity and deposit quality for both copper and gold. Also presented is an empirical model of how the hydrodynamic and electrochemical factors influence growth mechanisms and limit deposition rates. Potential applications of the process are also discussed.
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页码:130 / 142
页数:13
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