EFFECTS OF ELECTRONIC AND RECOIL PROCESSES IN POLYMERS DURING ION-IMPLANTATION

被引:95
|
作者
LEE, EH
RAO, GR
LEWIS, MB
MANSUR, LK
机构
[1] Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge
基金
美国能源部;
关键词
D O I
10.1557/JMR.1994.1043
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It has been shown that ion implantation produces remarkable improvements in surface-sensitive mechanical properties, as well as other physical and chemical properties in polymers. To understand mechanisms underlying such property changes, various polymeric materials were subjected to bombardment by energetic ions in the range of 200 keV to 2 MeV. The magnitude of property changes is strongly dependent upon ion species, energy, and dose. Analysis indicated that hardness and electrical conductivity increased by employing ion species with larger electronic cross sections and with increasing ion energy and dose. The results showed that electronic stopping or linear energy transfer (LET, energy deposited per unit track length per ion) for ionization was the most important factor for the enhancement of hardness, while nuclear stopping or linear energy transfer for displacement generally appeared to reduce hardness.
引用
收藏
页码:1043 / 1050
页数:8
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