ADVANCES IN SOLID PLANAR DOPANT SOURCES FOR SILICON

被引：0
|
作者：
STESLOW, JJ
RAPP, JE
WHITE, PL
机构：
[1] INT TEL & TELEGRAPH SEMICOND,W PALM BEACH,FL 33400
[2] OWENS ILLINOIS INC,TOLEDO,OH
来源：
SOLID STATE TECHNOLOGY | 1975年 / 18卷 / 01期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：31 / 34
页数：4
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