RF DIODE SPUTTERED PLATINUM FILMS

被引：12
|
作者：
MURARKA, SP [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源：
THIN SOLID FILMS | 1974年 / 23卷 / 03期
关键词：
D O I：
10.1016/0040-6090(74)90016-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：323 / 336
页数：14
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