SPACE-CHARGE EFFECTS AND DYNAMIC INTERACTIONS IN THE CASE OF A BROAD AND INTENSE ION-BEAM BOMBARDING AN INSULATED SUBSTRATE

被引：2
|
作者：
NIR, D [1 ]
机构：
[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,IL-32000 HAIFA,ISRAEL
来源：
VACUUM | 1986年 / 36卷 / 06期
关键词：
ION BEAMS - Applications - SUBSTRATES;
D O I：
10.1016/0042-207X(86)90010-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A small single grid ion gun system, isolated by a quartz tube, was investigated. The dependence of the potential of the floating substrates was measured, and its dependence on grid voltage and pressure was determined. This potential could be controlled by changing the parameters of the ion gun. This seems to be a new possibility for controlled deposition of insulating materials with ion beams of low energy. And it explains results which were obtained in deposition of diamond-like carbon films on insulating substrates.
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页码：311 / 315
页数：5
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