THE GROWTH-CHARACTERISTICS OF ION-BEAM SPUTTERED COCR FILMS ON TA ISOLATION LAYERS

被引:15
|
作者
GILL, HS
YAMASHITA, T
机构
[1] Hewlett-Packard Lab, Palo Alto, CA,, USA, Hewlett-Packard Lab, Palo Alto, CA, USA
关键词
D O I
10.1109/TMAG.1984.1063377
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
7
引用
收藏
页码:776 / 778
页数:3
相关论文
共 50 条
  • [1] GROWTH AND PROPERTIES OF ION-BEAM SPUTTERED HGCDTE FILMS
    KRISHNASWAMY, SV
    TAKEI, WJ
    FRANCOMBE, MH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 849 - 850
  • [2] NUCLEATION AND GROWTH OF ION-BEAM SPUTTERED METAL-FILMS
    XU, S
    EVANS, BL
    JOURNAL OF MATERIALS SCIENCE, 1992, 27 (11) : 3108 - 3117
  • [3] Growth and surface morphology of ion-beam sputtered Ti-Ni thin films
    Rao, Ambati Pulla
    Sunandana, C. S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (08): : 1517 - 1521
  • [4] Optical properties of ion-beam sputtered translucent silver films
    Stognij, A.I.
    Novitskij, N.N.
    Stukalov, O.M.
    Tushina, S.D.
    Kalinnikov, S.V.
    Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya, 2004, (01): : 56 - 61
  • [5] INTERNAL-STRESS IN ION-BEAM SPUTTERED MOLYBDENUM FILMS
    SUN, SS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 572 - 576
  • [6] STUDY OF THE GROWTH-CHARACTERISTICS OF SPUTTERED CR THIN-FILMS
    DUAN, SL
    ARTMAN, JO
    WONG, B
    LAUGHLIN, DE
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) : 4913 - 4915
  • [7] ELECTRICAL-PROPERTIES OF ION-BEAM SPUTTERED SILICON LAYERS ON SPINEL
    HINNEBERG, HJ
    WEIDNER, M
    HECHT, G
    WEISSMANTEL, C
    THIN SOLID FILMS, 1976, 33 (01) : 29 - 34
  • [8] PREPARATION OF COCR THIN-FILMS ON POLYMER SUBSTRATES BY ION-BEAM SPUTTERING
    SUZUKI, Y
    TAKIGUCHI, K
    YOSHITAKE, M
    YOTSUYA, T
    OGAWA, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1870 - 1873
  • [9] SYNTHESIS AND STRUCTURAL CHARACTERISTICS OF ION-BEAM SPUTTERED MULTILAYER AG/AL THIN-FILMS
    KIM, C
    QADRI, SB
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 1503 - 1507
  • [10] TA ADDITIVE EFFECT ON RF MAGNETRON SPUTTERED COCR FILMS
    TAMAI, H
    TAGAMI, K
    HAYASHIDA, H
    IEEE TRANSACTIONS ON MAGNETICS, 1988, 24 (06) : 2347 - 2349