ATOMIC LAYER EPITAXY

被引：0
|
作者：
SUNTOLA, T
HYVARINEN, J
机构：
来源：
ANNUAL REVIEW OF MATERIALS SCIENCE | 1985年 / 15卷
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：177 / 195
页数：19
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