ALLOYING OF AL-CU-SI METALLIZATION BY RAPID THERMAL ANNEALING

被引：5
|
作者：
ALVI, NS [1 ]
KWONG, DL [1 ]
机构：
[1] UNIV TEXAS, DEPT ELECT & COMP ENGN, MICROELECTR RES CTR, AUSTIN, TX 78712 USA
来源：
IEEE ELECTRON DEVICE LETTERS | 1986年 / 7卷 / 02期
关键词：
D O I：
10.1109/EDL.1986.26320
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：137 / 139
页数：3
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