DIGITAL WAVE-FRONT MEASURING INTERFEROMETRY - SOME SYSTEMATIC-ERROR SOURCES

被引：670

作者：

SCHWIDER, J ^{[1
]}

BUROW, R ^{[1
]}

ELSSNER, KE ^{[1
]}

GRZANNA, J ^{[1
]}

SPOLACZYK, R ^{[1
]}

MERKEL, K ^{[1
]}

机构：

[1] JENOPTIK GMBH, JENA, GERMANY

来源：

APPLIED OPTICS | 1983年 / 22卷 / 21期

关键词：

D O I：

10.1364/AO.22.003421

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3421 / 3432

页数：12

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