STRESSES IN EVAPORATED SILICON MONOXIDE FILMS

被引：21

|

作者：

NOVICE, MA

机构：

来源：

VACUUM | 1964年 / 14卷 / 10期

关键词：

D O I：

10.1016/0042-207X(64)90475-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：385 / &

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