REAL-TIME SPECTROSCOPIC ELLIPSOMETRY - APPLICATIONS IN POLYMER AND THIN-FILM GROWTH

被引：0
|
作者：
COLLINS, RW
机构：
[1] PENN STATE UNIV,MAT RES LAB,UNIV PK,PA 16802
[2] PENN STATE UNIV,DEPT PHYS,UNIV PK,PA 16802
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1991年 / 202卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：252 / POLY
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