DIRECT-WRITE SCANNED LASER DOES SUBMICRON LITHOGRAPHY

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作者：
BURSKY, D
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ELECTRONIC DESIGN | 1990年 / 38卷 / 06期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：28 / +
页数：1
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