CHARACTERIZATION OF PLASMA POLYMER-FILMS OF PHENYLSILANE BY X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：6
|
作者：
OELHAFEN, P [1 ]
CUTRO, JA [1 ]
HALLER, I [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1984年 / 34卷 / 02期
关键词：
D O I：
10.1016/0368-2048(84)80036-5
中图分类号：
O433 [光谱学];
学科分类号：
0703 ; 070302 ;
摘要：
引用
收藏
页码：105 / 113
页数：9
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