SYNCHROTRON-RADIATION-INDUCED SURFACE NITRIDATION OF SILICON AT ROOM-TEMPERATURE

被引：45
|
作者：
CERRINA, F
LAI, B
WELLS, GM
WILEY, JR
KILDAY, DG
MARGARITONDO, G
机构：
[1] UNIV WISCONSIN,DEPT PHYS,MADISON,WI 53706
[2] UNIV WISCONSIN,CTR SYNCHROTRON RADIAT,MADISON,WI 53706
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 09期
关键词：
D O I：
10.1063/1.98150
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：533 / 534
页数：2
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