DETERMINATION OF BACKSCATTERING FACTOR FOR QUANTITATIVE AUGER ANALYSIS

The backscattering factor R is necessary in quantitative Auger analysis with the matrix effects corrections. The most popular method of determination of this factor is based on the Monte Carlo simulation of electron trajectories in a solid sample with the use of theoretically calculated cross-sections for the scattering of those electrons on the sample atoms [1]. The cross-sections mentioned above are still not known firmly especially in the cases of low energies and high atomic numbers. In the present work we used the modified Wang method [2]. The energy distribution of the secondary electrons for particular energies of primary electrons is used for the backscattering factor determination, instead of the Monte Carlo calculations. Results for copper, silver, gold and three alloys of these metals are presented for primary electron energies of 1000-2000 eV and compared with the results known from the literature. The best agreement is obtained between our results and those presented by Love [3] and Shimizu [4] for higher ionization energies and by Jablonski [5] for lower energies.