DETERMINISTIC MODELS OF ION EROSION, REFLECTION AND REDEPOSITION

被引：23
|
作者：
SMITH, R
TAGG, MA
WALLS, JM
机构：
来源：
VACUUM | 1984年 / 34卷 / 1-2期
关键词：
D O I：
10.1016/0042-207X(84)90123-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：175 / 180
页数：6
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