OPTICAL-EMISSION ACTINOMETRY AND SPECTRAL-LINE SHAPES IN RF GLOW-DISCHARGES

被引：136

|

作者：

GOTTSCHO, RA

DONNELLY, VM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 02期

关键词：

D O I：

10.1063/1.333954

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：245 / 250

页数：6

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