RESIST HARDENING USING A CONFORMABLE MOLD APPLIED TO A PORTABLE CONFORMABLE MASK BILAYER SYSTEM

被引：2
|
作者：
WEILL, A
DECHENAUX, E
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 03期
关键词：
D O I：
10.1116/1.583802
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：667 / 670
页数：4
相关论文
共 28 条
  • [1] RESIST HARDENING USING A CONFORMABLE MOLD
    LAI, FS
    LIN, BJ
    VLADIMIRSKY, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 426 - 429
  • [2] IMPROVED PORTABLE CONFORMABLE MASK (PCM)
    LYONS, C
    MOREAU, W
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C436 - C436
  • [3] AQUEOUS PROCESSABLE PORTABLE CONFORMABLE MASK (PCM) FOR SUB-MICRON LITHOGRAPHY
    LYONS, C
    MOREAU, W
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (01) : 193 - 197
  • [4] A MOLDED DEEP-UV PORTABLE CONFORMABLE MASKING SYSTEM
    LIN, BJ
    CHAO, VW
    PETRILLO, KE
    YANG, BJL
    POLYMER ENGINEERING AND SCIENCE, 1986, 26 (16): : 1112 - 1115
  • [5] 2-LAYER RESIST FABRICATION BY NEW PORTABLE CONFORMABLE MASKING I-LINE LITHOGRAPHY
    ENDO, M
    SASAGO, M
    HIRAI, Y
    UENO, A
    NOMURA, N
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (01): : 55 - 58
  • [6] POLY(DIMETHYL-CO-DIPHENYLSILANE) AS A DEEP-UV AND AN OXYGEN PLASMA PORTABLE CONFORMABLE MASK
    LOONG, WA
    WANG, TH
    MICROELECTRONIC ENGINEERING, 1992, 18 (03) : 207 - 214
  • [7] Wearable Bioimpedance Hydration Monitoring System using Conformable AgNW Electrodes
    Songkakul, Tanner
    Wu, Shuang
    Ahmmed, Parvez
    Reynolds, William D., Jr.
    Zhu, Yong
    Bozkurt, Alper
    2021 IEEE SENSORS, 2021,
  • [8] HYBRID E-BEAM-DEEP-UV EXPOSURE USING PORTABLE CONFORMABLE MASKING (PCM) TECHNIQUE
    LIN, BJ
    CHANG, THP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1669 - 1671
  • [9] Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step
    Park, Junyong
    Yoon, Sanghoon
    Kang, Kisuk
    Jeon, Seokwoo
    SMALL, 2010, 6 (18) : 1981 - 1985
  • [10] Entropy Generation in a Mass-Spring-Damper System Using a Conformable Model
    Cruz-Duarte, Jorge M.
    Juan Rosales-Garcia, J.
    Rodrigo Correa-Cely, C.
    SYMMETRY-BASEL, 2020, 12 (03):
123