EFFECT OF CONDITIONS OF DIELECTRIC LAYERS DEPOSITION ON THE GALLIUM-ARSENIDE SURFACE-COMPOSITION

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ALOSHIN, VG
NEMOSHKALENKO, VV
SEMASHKO, OM
SENKEVICH, AI
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O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
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07 ; 0710 ; 09 ;
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页码:52 / 54
页数:3
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