LOW-LOSS SINGLEMODE OPTICAL WAVE-GUIDES WITH LARGE CROSS-SECTION IN SILICON-ON-INSULATOR

被引：116

作者：

SCHMIDTCHEN, J ^{[1
]}

SPLETT, A ^{[1
]}

SCHUPPERT, B ^{[1
]}

PETERMANN, K ^{[1
]}

BURBACH, G ^{[1
]}

机构：

[1] FRAUNHOFER INST MICROELECTR CIRCUITS & SYST,W-4100 DUISBURG 1,GERMANY

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 16期

关键词：

WAVE-GUIDES; OPTICAL WAVE-GUIDES;

D O I：

10.1049/el:19910930

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micrometres is reported. Measurements at a wavelength of 1.3 and 1.55-mu-m yield waveguide losses below 0.5 dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.

引用

页码：1486 / 1488

页数：3

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