LOCAL CHARACTERIZATION OF ULTRATHIN OXIDES ON SILICON-WAFERS BY SCANNING TUNNELING MICROSCOPY

被引：0
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作者：
DEPARGA, ALV
OCAL, C
ORTEGA, JE
MIRANDA, R
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来源：
VACUUM | 1990年 / 41卷 / 4-6期
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T [工业技术];
学科分类号：
08 ;
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页码：784 / 786
页数：3
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