STATUS OF RESEARCH-AND-DEVELOPMENT IN COORDINATE-MEASUREMENT TECHNOLOGY

被引：0

作者：

DICH, LZ

LATYEV, SM

机构：

来源：

JOURNAL OF OPTICAL TECHNOLOGY | 1994年 / 61卷 / 09期

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D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper discusses problems involved in developing and operating coordinate-measuring machines. The status of this area of precision instrumentation is analyzed. These problems are made critical not only by the requirements of the machine-tool industry but also by those of the microelectronics industry, both of which use coordinate tables, step-up gears, and other equipment in which precise coordinate measurements are necessary.

引用

页码：636 / 640

页数：5

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