CHARACTERIZATION OF THE SHALLOW AND DEEP LEVELS IN SI DOPED GAN GROWN BY METAL-ORGANIC VAPOR-PHASE EPITAXY

被引:71
|
作者
HACKE, P [1 ]
MAEKAWA, A [1 ]
KOIDE, N [1 ]
HIRAMATSU, K [1 ]
SAWAKI, N [1 ]
机构
[1] TOYODA GOSEI CO LTD,DEPT TECH RES & DEV 1,HARUHI,AICHI 452,JAPAN
关键词
GAN; HALL EFFECT; DEEP-LEVEL TRANSIENT SPECTROSCOPY; IMPURITY BAND CONDUCTION; CARRIER HOPPING;
D O I
10.1143/JJAP.33.6443
中图分类号
O59 [应用物理学];
学科分类号
摘要
Si doped GaN with room temperature free carrier concentration 1.1 x 10(17) cm(-3) studied using the Hall effect exhibits exponential carrier freeze-out over a large range with activation energy 28.0 +/- 0.5 meV; however, resistivity dependence on temperature suggests carrier hopping occurs at low temperature, GaN with greater Si concentration displays metallic impurity band conduction following the two-band model. Deep level transient spectroscopy results show a negligible concentration of other deep donors from native defects or unintentionally included impurities indicating that the active shallow donor is uniquely Si; however, photoluminescence tests show broad yellow emission with peak energy similar to 2.2 eV commonly observed in Si doped GaN.
引用
收藏
页码:6443 / 6447
页数:5
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