GROWTH OF ALPHA-AL2O3 FILMS BY MOLECULAR LAYER EPITAXY

被引：20
|
作者：
OYA, G
YOSHIDA, M
SAWADA, Y
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 15期
关键词：
D O I：
10.1063/1.98765
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1143 / 1145
页数：3
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