REACTIVITY OF AL SURFACE PHASES ON SILICON WITH RESPECT TO THE ADSORPTION OF ATOMIC-HYDROGEN

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作者：

SARANIN, AA ^{[1
]}

KHRAMTSOVA, EA ^{[1
]}

LIFSHITS, VG ^{[1
]}

机构：

[1] AUTOMAT & CONTROL PROC INST,VLADIVOSTOK 690014,RUSSIA

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ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 209卷

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O6 [化学];

学科分类号：

0703 ;

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页码：23 / COLL

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