MEASUREMENT OF SHORT LENGTHS WITH A SCANNING ELECTRON-MICROSCOPE

被引：0

作者：

BOGDANKEVICH, OV

ZHELKOBAEV, Z

KALENDIN, VV

KUDEYAROV, YA

NEVSOROVA, LN

机构：

来源：

MEASUREMENT TECHNIQUES USSR | 1985年 / 28卷 / 11期

关键词：

D O I：

10.1007/BF00868784

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：957 / 961

页数：5

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