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CHEMICAL ETCHING OF GERMANIUM WITH H3PO4-H2O2-H2O SOLUTION
被引:29
|
作者
:
KAGAWA, S
论文数:
0
引用数:
0
h-index:
0
KAGAWA, S
MIKAWA, T
论文数:
0
引用数:
0
h-index:
0
MIKAWA, T
KANEDA, T
论文数:
0
引用数:
0
h-index:
0
KANEDA, T
机构
:
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
|
1982年
/ 21卷
/ 11期
关键词
:
D O I
:
10.1143/JJAP.21.1616
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:1616 / 1618
页数:3
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