SOFT-X-RAY REFLECTOMETER WITH A LASER-PRODUCED PLASMA SOURCE

被引：34
|
作者：
NAKAYAMA, S
YANAGIHARA, M
YAMAMOTO, M
KIMURA, H
NAMIOKA, T
机构：
[1] Research Institute for Scientific Measurements, Tohoku University, Aoba-ku, Sendai, 980
来源：
PHYSICA SCRIPTA | 1990年 / 41卷 / 06期
关键词：
D O I：
10.1088/0031-8949/41/6/005
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A soft X-ray reflectometer with a laser-produced plasma source driven by a Q-switched Nd: YAG laser or a XeCl excimer laser was constructed. By comparing the reflectances of a multilayer mirror with the data obtained using synchrotron radiation, its usefulness for reflectance measurements in the soft X-ray region (40-130 eV) is demonstrated. © 1990 IOP Publishing Ltd.
引用
收藏
页码：754 / 757
页数：4
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