CONDENSATION NUCLEI IN SEMICONDUCTOR MANUFACTURING AREAS

被引：0

作者：

DONOVAN, RP

LOCKE, BR

OSBURN, CM

CAVINESS, A

机构：

[1] RES TRIANGLE INST,RES TRIANGLE PK,NC 27709

[2] MICROELECTR CTR N CAROLINA,RES TRIANGLE PK,NC 27709

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C317 / C317

页数：1

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