POLYSILAZANE ROUTES TO SILICON-NITRIDE

被引：0
|
作者：
SEYFERTH, D [1 ]
WISEMAN, GH [1 ]
机构：
[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1984年 / 187卷 / APR期
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：47 / POLY
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