THE SURFACE MODIFICATION USING ARGON RADIOFREQUENCY PLASMAS OF HIGHLY ORIENTED PYROLYTIC-GRAPHITE - A SCANNING TUNNELING MICROSCOPY STUDY

被引：0
|
作者：
YOU, HX [1 ]
BROWN, NMN [1 ]
ALASSADI, KF [1 ]
机构：
[1] UNIV ULSTER,DEPT APPL PHYS SCI,SURFACE SCI LAB,COLERAINE BT52 1SA,LONDONDERRY,NORTH IRELAND
来源：
SURFACE SCIENCE | 1992年 / 279卷 / 1-2期
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D O I：
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Scanning tunnelling microscopy has been used to characterise the surface modification of highly oriented pyrolytic graphite (HOPG) following exposure to a radio-frequency (RF) argon plasma. The STM topography of cleaved HOPG surfaces shows dramatic alteration in the course of etching. The surface features observed are strongly dependent on the plasma etching conditions used. Strains in the graphite lattice induced by defects generated by the low energy ions present during sputtering of the HOPG surface are believed to be responsible for the formation of the topographical features observed.
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页码：189 / 198
页数：10
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