GENERALIZED ROTATING-COMPENSATOR ELLIPSOMETRY

被引：46
|
作者：
HAUGE, PS [1 ]
机构：
[1] IBM CORP, THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
SURFACE SCIENCE | 1976年 / 56卷 / 01期
关键词：
D O I：
10.1016/0039-6028(76)90442-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：148 / 160
页数：13
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