The atomization efficiency of the Hitachi GA-3 graphite furnace for the production and containment of atomic vapour was determined for Ag, Cd, Cr, Ge and In by a method suggested. The method is based on the measurements of residence time, peak hight and peak area absorbances of analyte atoms. The beta and epsilon(a) values of above mentioned elements were experimentally determined by a method proposed. The experimental results show that the values of beta and epsilon(a) for Ag and Cd appeared to be stable in the temperature region studied. However, the beta and epsilon(a) values of remaining three elements(Cr, Ge, In) reached a stable value in higher temperature region. The beta and epsilon(a) values of In are increased obviously in the presence of Pd and ammonium salt of EDTA as a matrix modifier.