ION-BEAM MILLING OF PYROELECTRIC CERAMICS FOR ADVANCED THERMAL DETECTOR ARRAYS

被引：1
|
作者：
BACHE, RAC
OHARA, C
PARSONS, AD
SHORROCKS, NM
PEDDER, DJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期
关键词：
D O I：
10.1116/1.576304
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2988 / 2991
页数：4
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