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- [2] Fabrication of micro humidity sensor based on porous Al2O3 flints PROCEEDING OF THE TENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOLS I AND II, 2000, 3975 : 734 - 736
- [7] DYNAMIC FRACTURE-RESISTANCE OF AL2O3 AND SICW/AL2O3 JOURNAL DE PHYSIQUE III, 1991, 1 (C3): : 727 - 732
- [9] RESISTANCE-TYPE HUMIDITY SENSOR USING CNTS SENSING MATERIAL WITH AL2O3 CONFORMAL COATING FOR ENHANCED SENSITIVITY 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 761 - 764