FINITE-ELEMENT SIMULATION OF THIN-FILM STRAIN RESISTANCE

被引：0

作者：

HUANG, PZ ^{[1
]}

GONG, JZ ^{[1
]}

机构：

[1] SHANGHAI JIA TONG UNIV,OPTOELECTR & MICROELECTR SENSORS & HYBRID INTEGRATED CIRCUITS LAB,SHANGHAI 200052,PEOPLES R CHINA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 35卷 / 03期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1016/0924-4247(93)80161-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a finite-element simulation of thin-film strain resistance through the bending theory of an elastic thin plate, in which both the strain and the force of every node are solved through finite trigonal thin-plate elements and the change of the strain resistance associated with the acting loads is also calculated. The error between the theoretical solution above and the experimental results is so small that the solution can be regarded as a quantitative design method in the study of a sputtering thin-film tactile array sensor.

引用

页码：239 / 241

页数：3

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