WASTE GENERATION AND MANAGEMENT IN THE SEMICONDUCTOR INDUSTRY - A CASE-STUDY

被引：6

作者：

VAGLIASINDI, FGA ^{[1
]}

POULSOM, SR ^{[1
]}

机构：

[1] COLORADO STATE UNIV,FT COLLINS,CO 80523

来源：

WATER SCIENCE AND TECHNOLOGY | 1994年 / 29卷 / 09期

关键词：

HAZARDOUS WASTES; PRETREATMENT; REGULATIONS; SEMICONDUCTOR; WASTE-WATER; WASTE MINIMIZATION;

D O I：

10.2166/wst.1994.0501

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

The production of semiconductors is an extremely complex process involving the deposit of several layers on silicon wafers, patterning the layers through photolithography and adding dopants to alter the conductivity. The process generates gaseous, liquid and solid waste streams consisting of many diverse and toxic components including toxic organics, variable pH, fluoride and arsenic. This paper presents the results of a study which investigated the manufacturing processes of semiconductors, including: generated pollutants, applicable regulations in the USA, waste minimization practices, and waste treatment and disposal alternatives. As part of this investigation, a case study was conducted on the waste generation and management of a semiconductor facility located in the USA.

引用

页码：331 / 341

页数：11

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