BULK CHARGING OF DIELECTRIC FILMS BY LOW-ENERGY ELECTRONS

被引:9
|
作者
TYUTNEV, AP [1 ]
MINGALEEV, GS [1 ]
SAENKO, VS [1 ]
POZHIDAEV, ED [1 ]
AKKERMAN, AF [1 ]
机构
[1] ACAD SCI KASSR,INST HIGH ENERGY PHYS,ALMA ATA 480082,KASSR
来源
关键词
D O I
10.1002/pssa.2210730209
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:361 / 366
页数:6
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