ELECTRON-BEAM LITHOGRAPHY FOR THE FABRICATION OF AIR-BRIDGED, SUBMICRON SCHOTTKY COLLECTORS

被引：7
|
作者：
MULLER, RE [1 ]
MARTIN, SC [1 ]
SMITH, RP [1 ]
ALLEN, SA [1 ]
REDDY, M [1 ]
BHATTACHARYA, U [1 ]
RODWELL, MJW [1 ]
机构：
[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587636
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3668 / 3672
页数：5
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