MAKING SUB-MICRON HOLES BY PARTICLE TRACK ETCHING

被引：0
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作者：
PETERSON, DD
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来源：
MANUFACTURING ENGINEERING | 1982年 / 88卷 / 05期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：85 / 86
页数：2
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