Surface acoustic wave devices for sensor applications

被引：150
|
作者：
Liu Bo [1 ,2 ]
Chen Xiao [1 ,2 ]
Cai Hualin [1 ,2 ]
Mohammad, Mohammad Ali [1 ,2 ]
Tian Xiangguang [1 ,2 ]
Tao Luqi [1 ,2 ]
Yang Yi [1 ,2 ]
Ren Tianling [1 ,2 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, TNList, Beijing 100084, Peoples R China
来源：
JOURNAL OF SEMICONDUCTORS | 2016年 / 37卷 / 02期
基金：
加拿大自然科学与工程研究理事会; 中国博士后科学基金; 中国国家自然科学基金;
关键词：
surface acoustic wave; sensor; sensor application;
D O I：
10.1088/1674-4926/37/2/021001
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
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页数：9
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