APPLYING MACHINE LEARNING TO SEMICONDUCTOR MANUFACTURING

被引：57
|
作者：
IRANI, KB
CHENG, J
FAYYAD, UM
QIAN, ZG
机构：
[1] JET PROP LAB,AI GRP,M-S 525-3660,PASADENA,CA 91109
[2] UNIV MICHIGAN,ANN ARBOR,MI 48109
[3] FORD MOTOR CO,ENGINE RES DEPT,RES LAB,DEARBORN,MI 48121
[4] GM CORP,RES LABS,ARTIFICIAL INTELLIGENCE SERV,ELECTR DATA SERV,DETROIT,MI 48202
来源：
IEEE EXPERT-INTELLIGENT SYSTEMS & THEIR APPLICATIONS | 1993年 / 8卷 / 01期
关键词：
D O I：
10.1109/64.193054
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
[No abstract available]
引用
收藏
页码：41 / 47
页数：7
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