ENERGY-DISTRIBUTION OF ION-BEAM FROM VARIOUS LIQUID-METAL ION SOURCES

被引：3

作者：

ARIMOTO, H

MIYAUCHI, E

HASHIMOTO, H

KOMURO, M

机构：

[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN

[2] OPTOELECTR JOINT RES LAB,NAKAHARA KU,KAWASAKI 211,JAPAN

来源：

JOURNAL DE PHYSIQUE | 1987年 / 48卷 / C-6期

关键词：

D O I：

10.1051/jphyscol:1987624

中图分类号：

学科分类号：

摘要：

引用

页码：147 / 152

页数：6

共 50 条

[1] ON THE MECHANISM OF ENERGY-DISTRIBUTION IN LIQUID-METAL ION SOURCES
KOMURO, M
ARIMOTO, H
KATO, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 923 - 926
[2] LIQUID-METAL ION SOURCES AND APPLICATIONS IN FOCUSED ION-BEAM SYSTEMS
CORELLI, JC
HIGUCHIRUSLI, R
BALAKRISHNAN, S
LIEBMANN, L
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 936 - 936
[3] EXPERIMENTAL-STUDY ON THE INFLUENCE OF LIQUID-METAL ION-SOURCE ENERGY-DISTRIBUTION ON FOCUSED ION-BEAM INDUCED DEPOSITION
YASAKA, A
YAMAOKA, T
KAITO, T
ADACHI, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (05): : 2642 - 2647
[4] ON THE ENERGY-DISTRIBUTION OF DOUBLY CHARGED ATOMIC IONS EMITTED FROM LIQUID-METAL ION SOURCES
PAPADOPOULOS, S
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (01) : 194 - 199
[5] ION-BEAM FORMATION AND DISPERSION IN LIQUID-METAL IONS SOURCES
MISKOVSKY, NM
CUTLER, PH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (06) : C234 - C234
[6] EMISSION CHARACTERISTICS OF EUTECTIC ALLOY LIQUID-METAL ION SOURCES FROM FOCUSED ION-BEAM SYSTEMS
MACHALETT, F
MUHLE, R
STIEBRITZ, I
[J]. EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 474 - 476
[7] MEASUREMENT OF THE ENERGY-DISTRIBUTION OF A GALLIUM LIQUID-METAL ION-SOURCE
SWANSON, LW
SCHWIND, GA
BELL, AE
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (07) : 3453 - 3455
[8] FINE FOCUSED ION-BEAM SYSTEM USING LIQUID-METAL ALLOY ION SOURCES AND MASKLESS FABRICATION
GAMO, K
INOMOTO, Y
OCHIAI, Y
NAMBA, S
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : C110 - C110
[9] BEAM INTERACTIONS IN A FOCUSED ION-BEAM SYSTEM WITH A LIQUID-METAL ION-SOURCE
DEJAGER, PWH
VIJGEN, LJ
[J]. MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 107 - 110
[10] ON THE ENERGY-DISTRIBUTION OF CLUSTERS FROM LIQUID GOLD ION SOURCES
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BARR, DL
BROWN, WL
[J]. JOURNAL DE PHYSIQUE, 1986, 47 (C-2): : 101 - 106

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